Farhang Shadman

Title: 
Director SRC/Sematech Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
Email Address: 
shadman@erc.arizona.edu
Research Interests: 
Applications of chemical reaction engineering in semiconductor and optoelectronics manufacturing, advanced materials processing and environmental contamination control.

Director, SRC/SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing; Regents Professor; Professor of Chemical and Environmental Engineering; Professor of Optical Sciences

Ph.D. University of California, Berkeley, 1972.

Dr. Shadman joined The University of Arizona faculty in 1979. Prior to that, he was a senior research scientist at the General Motors Research Laboratories in Michigan.

His primary research interest is in the application of chemical reaction engineering in semiconductor manufacturing, advanced materials processing and environmental contamination control. His work in these areas has won several awards including the 1997 Sematech/SRC/SIA award for excellence in research. He has extensive consulting experience with semiconductor manufacturing companies and has been a member of several advisory committees for this industry. He was the founder of the Sematech Center of Excellence for Contamination/Defect Control at The University of Arizona and is currently the Director of NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing, which is a consortium including the University of Arizona, MIT, Stanford, UC-Berkeley, Cornell University and Arizona State University.

 

Web Site: 
http://www.erc.arizona.edu/